pilot line box coater E Beam, Sputter and Thermal source, RIE
options Turbo, cryo and diffusion pump options. Full range of
sample tooling Large substrate capacity
MiniLab is a new concept in vacuum deposition systems.
It is an ideal tool for pilot line, R&D and academic teaching
Created by an experienced team of designers with a background in
UHV deposition technology, the MiniLab is a fully
integrated mini box coater that achieves repeatable and
Problems associated with cramped multi— technique box coater
systems have been overcome and miniaturised.
Because MiniLab was designed as a multi—technique
system from the start, it is able to adapt to configurations
that many larger coating units find impossible to attain.
With the maximum sample size at 370mm o/d MiniLab
competes with major OEM system designs but at a fraction of the
price. Sample change is rapid due to the simple quick release
sample plate and boss arrangement.
Standard pumping is by way of a 500 lt/sec turbo molecular pump
and dual stage rotary mechanical backing / roughing pump. An
additional cryo panel can be mounted in front of the turbo if
high gas loads are experienced.
Other pumping options (such as a dry scroll roughing pump) are
Most importantly, the Minilab is cost effective.
The modular design concept allows for retrofit additions as and
when the budget allows. The Minilab chamber readily accepts
components from OEMs so the user is not forced into expensive
Techniques and control systems
The MiniLab can be configured for true multi—
technique, multi—layer deposition processes making it ideal for
small scale production and R&D prototyping.
A fully loaded system would, for example, include the following
a 4 pocket E-Beam source with water cooling;
HT and rotation device;
a 4 filament thermal source with discrete filament selection (
a “flexihead” magnatron for sputtering;
a variable speed rotary sample stage 0-40 rpm;
sample heating; up to 300°C with Halogen lamps, or 1000°C with
cleaning / RIE EtchStik option;
- a PC platform thin film process control system capable of
electron beam evaporator
A small footprint 4 pocket (3cc each) rotary hearth water cooled
source with quick release emitter, permanent magnet focussing
and beam sweep capability. There is a choice of solid state or
variac type controls and PSU.
TE4 thermal (resistive) evaporator
4 boat / filament capability, water cooled base plate, removable
shielding and co-deposition configurable. The TE4 is designed
for all round capability and is an ideal entry level organic
For users wishing to perform reactive ion etch techniques
without transferring to a dedicated RIE system, the EtchStik is
a cost effective solution. 70mm aluminium electrode, variable
height design, non water cooled, RF supply.
The MiniLab accepts flexihead sources up to 4 inch diameter and
fixed sources up to 7 inch diameter. The flexihead design allows
for user defined area coverage and working distance giving
greater control over the deposition rate and sample size. The
source accepts DC, pulsed DC and HF supplies.
Automated sample rotation kit variable speed motor, gearbox,
controller, 10-60 rpm, Sample plate and boss.
ME1O: Mini e-beam evaporator for refractory metal wire
samples — locates on side port. Cheapest e-beam retrofit on the
AS3000V: Small area dry etch / sample cleaning ion
source. Variable 200eV - 3000eV beam energy.
SHC-300: Sample heater controller, digital timer, TC and
set point, low hysterysis. 2 Zone.
Control and automation
Vacuum control is one button start / vent, whilst the Windows
platform SQM242 maintains programmable events and process
sequencing for all automated deposition components and
Utilising the latest film monitor and control systems, the user
is able to set multi—layer runs and control each step of the
process and data log events for off line post analysis. The
control system is supplied with off line software for setting up
of film runs without the need to suffer down time. Up to 16
quartz crystal monitors and 4 discrete evaporation sources can
be operated simultaneously.
Chamber Material: all stainless steel 316
Finish: polished to mirror grade 8
System dimensions (mm): 1650x1120x650
Top plate ports: 3 of NW35CF
Side wall ports: 2 of NW35CF
Rear wall port: 1 of NW150CF
Front door port: 1 of NW63CF
Base port: 25 of NW25 0 ring sealed
Door: 12mm s/s with O ring seal
Door seal: 7mm viton in dovetail groove with 2 x thumb screw
door retaining clamps
Bakeable: to 200°C
Leak tested: to better than 5 x 10e-9 mbar