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High temperature laboratory furnaces up to 2100C, with a range of hot zones for both crucibles and flat wafers. Laboratory furnaces are fully interlocked and have simple one button pump and vent operation.

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2100°C Vacuum / Inert Atmosphere Laboratory Furnaces with all graphite hot zones.

 

          

• Maximum hot zone temperature 2100C on standard furnaces. Higher temperatures available as a special option.

• Furnaces have a small footprint, are easily portable on 4 large wheels, and are mounted in a double bay 19" rack mount enclosure 1125mm wide x 1200mm high x 590mm deep.

• Variety of hot zone sizes for crucibles and flat wafer heating, including dual zone heating for high uniformity on large wafers.

• Semi-automatic with simple operation using single buttons for :- Pump - Vent - Gas On - Gas Off. PLC controls pumping and venting cycles.

• Fully interlocked for safety against operator error including motorised lid lift. Interlock state displayed on front panel for easy error diagnosis.

• Fast ramp up time, ambient to 2100C in 18 minutes as standard. Faster ramp times available as a special option.

• Fitted with RKC programmable temperature controller, enabling multi step ramp and cool cycles.

• Easy to install requires 240v (or 208v) x 40a single phase electric, cooling water and Argon gas supply.

• Fully water cooled vacuum chamber and power feedthroughs enable continuous operation without overheating.

• Can be run using just a rotary vane pump to ultimate vacuum of 9x10e-3 torr.

• PLC runs pump - vent dilution sequence with inert gas to remove residual Oxygen. Pump down time is just 30 minutes, until furnace can be run.

• Turbo pump and diffusion pump options available for high vacuum operation.

• Can operate at atmospheric pressure in an inert atmosphere.

 

Standard Furnace Sizes

Part Number	Hot Zone Size	Power	Supply Voltage	Max Temperature
LVF-C-61-75-2100	Ø60.5 x 75mm Crucible	7.8kW	200-240 volts	2100°C
LVF-C-155-88-2100	Ø155 x 88mm Crucible	12kW	200-240 volts	2100°C
LVF-W-8-2100	Ø8" Wafer	14kW	200-240 volts	2100°C

• We can produce any other hot zone sizes as specials.

• Wafer furnace can be dual zone for high uniformity on the substrate.

• Other supply voltages available on request.

 

Laboratory Furnace ramp and cool down times

 

Fast standard ramp up times. Can be even faster if required by using larger power supply.

 

Simple Furnace Control, fully interlocked by PLC for safety and ease of operation

• Semi-automatic with simple operation using single buttons for :- Pump - Vent - Gas On - Gas Off.

• PLC runs pump - vent dilution sequence with inert gas to remove residual Oxygen. Pump down time is just 30 minutes, until furnace can be run.

• Turbo pump and diffusion pump options available for high vacuum operation.

• Can operate at atmospheric pressure in an inert atmosphere.

• Fully interlocked for safety and against operator error, including motorised lid lift, to prevent chamber being opened at high temperature.

• Interlock state displayed on front panel for easy error diagnosis.

• RKC900 pid temperature controller for exact temperature control, and programmable ramp and cool sequences.

 

Supply Services

• Easy installation with quick connect water hose couplings. Requires 6 litres/min @ ambient temperature

• Process gas can run pneumatic valves @ 60psi, system includes gas pressure regulator and gauge.

• Single phase 200-240volt power source required

• Edwards RV8 rotary pump connected with KF24 bellows hose. Ultimate vacuum 9x10e-3 torr.

 

 

 

 

 

 

 

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